QPV(H) High-Speed Diaphragm Valve

Zhongke Aier (Beijing) Technology Co., Ltd.

Product overview

Fast-response diaphragm valve listed for ALD process-gas systems.

This high-speed diaphragm valve is presented for atomic-layer-deposition gas delivery. The source title uses QPV(H), while the introduction uses a different series spelling; the ordering code therefore needs confirmation. Its published construction combines a 316L VIM+VAR body, a nickel-cobalt alloy diaphragm and a PFA sealing element, with normal- and high-temperature versions.

Diaphragm Valve category

Published specifications

Body: 316L VIM+VAR
Diaphragm: Ni-Co alloy / UNS R30003
Pressure entry: Vacuum to 145 psig
Cv options: 0.27 or 0.62
Temperature versions: 0–70°C; 0–200°C high-temperature version

Selection points

Confirm the QPV(H) ordering code because the introduction spells the series differently.
Specify ALD pulse duty, gas and the required mounting or end connection.